Growth of Crystalline Silicon Carbide by CVD Using...

MRS Proceedings 2006 / 1 Vol. 911

Growth of Crystalline Silicon Carbide by CVD Using Chlorosilane Gases

Loboda, Mark, MacMillan, M. F., Wan, J., Chung, G., Carlson, E., Makarov, Y., Galyukov, A., Molnar, M. J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B02-03
Date:
January, 2006
File:
PDF, 164 KB
english, 2006
Conversion to is in progress
Conversion to is failed