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Study on the Effect of RTA Ambient to Shallow N+/P Junction Formation using PH3 Plasma Doping
Do, Seung-woo, Song, Byung-Ho, Jung, Ho, Kong, Seong-Ho, Oh, Jae-Geun, Lee, Jin-Ku, Ju, Min-Ae, Jeon, Seung-Joon, Ku, Ja-Chun, Lee, Yong-HyunVolume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E03-06
Date:
January, 2008
File:
PDF, 502 KB
english, 2008