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Combining X-Ray Diffraction and Substrate Deflection Analysis to Understand Internal Stress in Electroless Copper Films
Sharma, Tanu, Brüning, Ralf, Brown, Delilah A., Bamberg, Simon, Merschky, Michael, Brüning, FrankVolume:
1529
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1719
Date:
January, 2012
File:
PDF, 1.40 MB
english, 2012