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Transmission Fourier Transform Infra-red Spectroscopy Investigation of Structure Property Relationships in Low-k SiOxCy:H Dielectric Thin Films
King, Sean W., Mays, Ebony, Ege, Canay, Hellgren, Niklas, Xu, Jessica, Li, Han, Boyanov, BoyanVolume:
1520
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1691
Date:
January, 2013
File:
PDF, 522 KB
english, 2013