Tensile Film Stress of Parylene Deposited on Liquid
Binh-Khiem, Nguyen, Matsumoto, Kiyoshi, Shimoyama, IsaoVolume:
26
Language:
english
Journal:
Langmuir
DOI:
10.1021/la102790w
Date:
December, 2010
File:
PDF, 2.46 MB
english, 2010