Local deposition of SiO x plasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)
Schäfer, J, Foest, R, Quade, A, Ohl, A, Weltmann, K-DVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/19/194010
Date:
October, 2008
File:
PDF, 1.51 MB
english, 2008