[IEEE 1998 Proceedings. 48th Electronic Components and Technology Conference (Cat. No.98CH36206) - Seattle, WA, USA (25-28 May 1998)] 1998 Proceedings. 48th Electronic Components and Technology Conference (Cat. No.98CH36206) - Anodization for forming thin film embedded capacitors in MCM-D and MCM-L substrates
Nelms, D., Ulrich, R., Schaper, L., Reeder, S.Year:
1998
Language:
english
DOI:
10.1109/ectc.1998.678701
File:
PDF, 547 KB
english, 1998