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Full Operational Range Dynamic Modeling of Microcantilever Beams
Abtahi, Mansour, Vossoughi, Gholamreza, Meghdari, AliVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2256108
Date:
October, 2013
File:
PDF, 6.76 MB
english, 2013