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Influence of Nonthermal Plasma Reactor Type on $ \hbox{CF}_{4}$ and $\hbox{SF}_{6}$ Abatements
Hsin Liang Chen,, How-Ming Lee,, Li Chun Cheng,, Moo Been Chang,, Sheng Jen Yu,, Shou-Nan Li,Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2008.918675
Date:
April, 2008
File:
PDF, 439 KB
english, 2008