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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Characterization of thin metal oxide films grown by atomic layer deposition
Evans, Peter J., Prince, Kathryn, Triani, Gerry, Finnie, Kim S., Mitchell, David R. G., Barbe, Christophe J., Chiao, Jung-Chih, Hariz, Alex J., Jamieson, David N., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2004
Language:
english
DOI:
10.1117/12.524052
File:
PDF, 172 KB
english, 2004