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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Measurements of corner cubes microstructures by high-magnification digital holographic microscopy
Kühn, Jonas, Cuche, Etienne, Emery, Yves, Colomb, Tristan, Charrière, Florian, Montfort, Frédéric, Botkine, Mikhail, Aspert, Nicolas, Depeursinge, Christian, Gorecki, Christophe, Asundi, Anand K., OstVolume:
6188
Year:
2006
Language:
english
DOI:
10.1117/12.662030
File:
PDF, 759 KB
english, 2006