Scatterometry characterization of spacer double patterning...

Scatterometry characterization of spacer double patterning structures

Dasari, Prasad
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Volume:
9
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3531999
Date:
October, 2010
File:
PDF, 968 KB
english, 2010
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