Si+ ion implanted MPS bulk GaN diodes

Solid-State Electronics 2004 Vol. 48; Iss. 5

Si+ ion implanted MPS bulk GaN diodes

Y. Irokawa, J. Kim, F. Ren, K.H. Baik, B.P. Gila, C.R. Abernathy, S.J. Pearton, C.-C. Pan, G.-T. Chen, J.-I. Chyi, S.S. Park
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Volume:
48
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.sse.2003.09.018
File:
PDF, 306 KB
english, 2004
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