Development of silicon nitride dots for nanocrystal memory cells
Y.M Wan, N Buffet, K van der Jeugd, P Mur, D Mariolle, G Nicotra, S LombardoVolume:
48
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2004.03.020
File:
PDF, 447 KB
english, 2004