Development of silicon nitride dots for nanocrystal memory...

Development of silicon nitride dots for nanocrystal memory cells

Y.M Wan, N Buffet, K van der Jeugd, P Mur, D Mariolle, G Nicotra, S Lombardo
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Volume:
48
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2004.03.020
File:
PDF, 447 KB
english, 2004
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