A lateral structure for low-cost fabrication of COOLMOSTM

A lateral structure for low-cost fabrication of COOLMOSTM

Davood Shahrjerdi, Morteza Fathipour, Bahman Hekmatshoar, Ali Khakifirooz
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Volume:
48
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2004.05.041
File:
PDF, 360 KB
english, 2004
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