Segregation coefficient of impurities at polycrystalline Si/HfO2 interfaces
Kunihiro Suzuki, Hiroshi Minakata, Tsunehisa Sakota, Masaomi Yamaguchi, Yasukuki TamuraVolume:
49
Year:
2005
Language:
english
Pages:
3
DOI:
10.1016/j.sse.2004.06.018
File:
PDF, 285 KB
english, 2005