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A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad
Zhou, Ping, Dong, Zhigang, Kang, Renke, Jin, Zhuji, Guo, DongmingVolume:
77
Language:
english
Journal:
The International Journal of Advanced Manufacturing Technology
DOI:
10.1007/s00170-014-6438-7
Date:
March, 2015
File:
PDF, 1.82 MB
english, 2015