Scaling of lowered source/drain (LSD) and raised...

Scaling of lowered source/drain (LSD) and raised source/drain (RSD) ultra-thin body (UTB) SOI MOSFETs

Xia An, Ru Huang, Xing Zhang, Yangyuan Wang
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Volume:
49
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2004.11.021
File:
PDF, 359 KB
english, 2005
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