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Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications
C. Bonafos, H. Coffin, S. Schamm, N. Cherkashin, G. Ben Assayag, P. Dimitrakis, P. Normand, M. Carrada, V. Paillard, A. ClaverieVolume:
49
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.sse.2005.10.001
File:
PDF, 792 KB
english, 2005