Evaluation of the fluorinated antisticking layer by using photoemission and NEXAFS spectroscopies
Haruyama, Yuichi, Nakai, Yasuki, Matsui, ShinjiVolume:
121
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-015-9104-5
Date:
November, 2015
File:
PDF, 595 KB
english, 2015