Measurement of in-plane and depth strain profiles in...

Solid-State Electronics 2007 Vol. 51; Iss. 2

Measurement of in-plane and depth strain profiles in strained-Si substrates

Atsushi Ogura, Daisuke Kosemura, Kosuke Yamasaki, Satoshi Tanaka, Yasuto Kakemura, Akiko Kitano, Ichiro Hirosawa
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
51
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2007.01.002
File:
PDF, 809 KB
english, 2007
Conversion to is in progress
Conversion to is failed