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MEMS on cavity-SOI wafers
Hannu Luoto, Kimmo Henttinen, Tommi Suni, James Dekker, Jari Mäkinen, Altti TorkkeliVolume:
51
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2007.01.007
File:
PDF, 574 KB
english, 2007