High aspect ratio cylindrical nanopores in...

Solid-State Electronics 2007 Vol. 51; Iss. 10

High aspect ratio cylindrical nanopores in silicon-on-insulator substrates

Leo Petrossian, Seth J. Wilk, Punarvasu Joshi, Sahar Hihath, Jonathan D. Posner, Stephen M. Goodnick, Trevor J. Thornton
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Volume:
51
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2007.06.014
File:
PDF, 526 KB
english, 2007
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