Gate induced floating body effects in TiN/SiON and TiN/HfO2...

Gate induced floating body effects in TiN/SiON and TiN/HfO2 gate stack triple gate SOI nFinFETs

J.M. Rafí, E. Simoen, A. Mercha, N. Collaert, K. Hayama, F. Campabadal, C. Claeys
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Volume:
51
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.sse.2007.07.012
File:
PDF, 3.86 MB
english, 2007
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