![](/img/cover-not-exists.png)
Gate induced floating body effects in TiN/SiON and TiN/HfO2 gate stack triple gate SOI nFinFETs
J.M. Rafí, E. Simoen, A. Mercha, N. Collaert, K. Hayama, F. Campabadal, C. ClaeysVolume:
51
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.sse.2007.07.012
File:
PDF, 3.86 MB
english, 2007