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Electrical characterization of true Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity
V. Kilchytska, T.M. Chung, B. Olbrechts, Ya. Vovk, J.-P. Raskin, D. FlandreVolume:
51
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2007.07.021
File:
PDF, 265 KB
english, 2007