New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for...

Solid-State Electronics 2007 Vol. 51; Iss. 11-12

New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60 nm and below DRAMs

Ho Jin Cho, Young Dae Kim, Dong Su Park, Euna Lee, Cheol Hwan Park, Jun Soo Jang, Keum Bum Lee, Hai Won Kim, Young Jong Ki, Il Keun Han, Yong Wook Song
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Volume:
51
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2007.09.030
File:
PDF, 504 KB
english, 2007
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