Critical issues in plasma deposition of microcrystalline silicon for thin film transistors
Pere Roca i Cabarrocas, Yassine Djeridane, V.D. Bui, Yvan Bonnassieux, Alexey AbramovVolume:
52
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2007.10.028
File:
PDF, 236 KB
english, 2008