Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure
Imbert, B., Blot, X., Tauzin, A., Salvetat, T., Lagoutte, E., Lecouvey, C., Chaira, T., Larrey, V., Bridoux, C., Fournel, F., Delaye, V., Papon, A.-M., Moriceau, H., Carron, V.Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2438-2
Date:
May, 2015
File:
PDF, 982 KB
english, 2015