A complete analytical model for clamped edge circular...

Microsystem Technologies 2016 / 5 Vol. 22; Iss. 5

A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor

Jindal, Sumit Kumar, Mahajan, Ankush, Raghuwanshi, Sanjeev Kumar
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2475-x
Date:
May, 2016
File:
PDF, 1.30 MB
english, 2016
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