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The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes
Xi, Zhanwen, Cao, Yun, Yu, Pingxin, Nie, Weirong, Wang, JiongVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2509-4
Date:
August, 2016
File:
PDF, 3.78 MB
english, 2016