Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator
N.D. Badila-Ciressan, M. Mazza, D. Grogg, A.M. IonescuVolume:
52
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2008.04.022
File:
PDF, 1.09 MB
english, 2008