Nano-gap micro-electro-mechanical bulk lateral resonators...

Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator

N.D. Badila-Ciressan, M. Mazza, D. Grogg, A.M. Ionescu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
52
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2008.04.022
File:
PDF, 1.09 MB
english, 2008
Conversion to is in progress
Conversion to is failed