Performance improvement in narrow MuGFETs by gate work...

Solid-State Electronics 2009 Vol. 53; Iss. 7

Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering

I. Ferain, R. Duffy, N. Collaert, M.J.H. van Dal, B.J. Pawlak, B. O’Sullivan, L. Witters, R. Rooyackers, T. Conard, M. Popovici, S. van Elshocht, M. Kaiser, R.G.R. Weemaes, J. Swerts, M. Jurczak, R.J.
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Volume:
53
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2009.03.017
File:
PDF, 742 KB
english, 2009
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