Local Piezoelectric Properties and Polarity Distribution of ZnO Films Deposited at Different Substrate Temperatures
Li, Cuiping, Dai, Wei, Xu, Sheng, Li, Xiaowei, Gao, Chengyao, Chen, Ximing, Yang, BaoheVolume:
44
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-015-3659-y
Date:
April, 2015
File:
PDF, 945 KB
english, 2015