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Doped monolithic langasite structures for high temperature MEMS
Jan Sauerwald, Denny Richter, Erik Ansorge, Bertram Schmidt, Holger FritzeVolume:
179
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.ssi.2008.02.049
File:
PDF, 345 KB
english, 2008