Scratching by pad asperities in copper...

Journal of Central South University 2014 / 11 Vol. 21; Iss. 11

Scratching by pad asperities in copper electrochemical-mechanical polishing

Bian, Yan-fei, Zhai, Wen-jie, Cheng, Yuan-yuan, Zhu, Bao-quan
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Volume:
21
Language:
english
Journal:
Journal of Central South University
DOI:
10.1007/s11771-014-2411-8
Date:
November, 2014
File:
PDF, 961 KB
english, 2014
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