Fabrication process of a microstructures based on...

Journal of Mechanical Science and Technology 2015 / 4 Vol. 29; Iss. 4

Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices

Galindo-Mentle, M., López-Huerta, F., Palomino-Merino, R., Zúñiga-Islas, C., Calleja-Arriaga, W., Herrera-May, A. L.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
29
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-015-0339-z
Date:
April, 2015
File:
PDF, 18.36 MB
english, 2015
Conversion to is in progress
Conversion to is failed