Chemical composition, crystallographic structure and...

Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films

M. Radecka, E. Pamula, A. Trenczek-Zajac, K. Zakrzewska, A. Brudnik, E. Kusior, N.-T.H. Kim-Ngan, A.G. Balogh
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Volume:
192
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.ssi.2010.07.021
File:
PDF, 892 KB
english, 2011
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