![](/img/cover-not-exists.png)
Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films
M. Radecka, E. Pamula, A. Trenczek-Zajac, K. Zakrzewska, A. Brudnik, E. Kusior, N.-T.H. Kim-Ngan, A.G. BaloghVolume:
192
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.ssi.2010.07.021
File:
PDF, 892 KB
english, 2011