3-D Observation of dopant distribution at NAND flash memory floating gate using Atom probe tomography
Lee, Ji-hyun, Chae, Byeong-Kyu, Kim, Joong-Jeong, Lee, Sun Young, Park, Chan GyungVolume:
11
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-014-4194-3
Date:
January, 2015
File:
PDF, 1.02 MB
english, 2015