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Carbon system syntheses on a chip by multiple microplasma CVD
Tsuyohito Ito, Ken Katahira, Azusa Asahara, Sergei A Kulinich, Kazuo TerashimaVolume:
4
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/j.stam.2003.09.016
File:
PDF, 375 KB
english, 2003