International Journal of Precision Engineering and Manufacturing-Green Technology
2015 / 1 Vol. 2; Iss. 1
Effect of surfactant on package substrate in chemical mechanical planarization
Jang, Soocheon, Jeong, Haedo, Yuh, Minjong, Park, JaehongVolume:
2
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing-Green Technology
DOI:
10.1007/s40684-015-0008-9
Date:
January, 2015
File:
PDF, 478 KB
english, 2015