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Fast deposition of diamond-like and diamond films using a plasmatron with interelectrode inserts
Tsyganov, D. L., Veremeichik, A. I., Sazonov, M. I.Volume:
58
Language:
english
Journal:
Instruments and Experimental Techniques
DOI:
10.1134/S0020441215010303
Date:
March, 2015
File:
PDF, 239 KB
english, 2015