Structure and composition of silicon carbide films...

Physics of the Solid State 2014 / 11 Vol. 56; Iss. 11

Structure and composition of silicon carbide films synthesized by ion implantation

Nussupov, K. Kh., Beisenkhanov, N. B., Zharikov, S. K., Beisembetov, I. K., Kenzhaliev, B. K., Akhmetov, T. K., Seitov, B. Zh.
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Volume:
56
Language:
english
Journal:
Physics of the Solid State
DOI:
10.1134/S1063783414110237
Date:
November, 2014
File:
PDF, 1.22 MB
english, 2014
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