Optical properties and bandgap evolution of ALD HfSiOx films
Yang, Wen, Fronk, Michael, Geng, Yang, Chen, Lin, Sun, Qing-Qing, Gordan, Ovidiu D, zhou, Peng, Zahn, Dietrich, Zhang, DavidVolume:
10
Year:
2015
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-014-0724-z
File:
PDF, 872 KB
english, 2015