Low temperature deposition of titanium oxide containing...

Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2

Fuyuki Kano, Hiroshi Uchida, Seiichiro Koda
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Volume:
50
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.supflu.2009.06.008
File:
PDF, 1.03 MB
english, 2009
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