Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2
Fuyuki Kano, Hiroshi Uchida, Seiichiro KodaVolume:
50
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.supflu.2009.06.008
File:
PDF, 1.03 MB
english, 2009