Characterization of Ti-B-C-N films deposited by dc...

Journal of Superhard Materials 2015 / 1 Vol. 37; Iss. 1

Characterization of Ti-B-C-N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target

Onoprienko, A. A., Ivashchenko, V. I., Timofeeva, I. I., Sinelnitchenko, A. K., Butenko, O. A.
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Volume:
37
Language:
english
Journal:
Journal of Superhard Materials
DOI:
10.3103/S1063457615010037
Date:
January, 2015
File:
PDF, 503 KB
english, 2015
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