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SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Laser etching of indium tin oxide thin films by ultra-short pulsed laser
Tanaka, Ryuzo, Takaoka, T., Mizukami, H., Arai, T., Iwai, Y., Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.540533
File:
PDF, 412 KB
english, 2003