Copper film deposition by a hot refractory anode vacuum arc

Surface and Coatings Technology 2004 Vol. 177-178; Iss. none

Copper film deposition by a hot refractory anode vacuum arc

I.I. Beilis, A. Shashurin, D. Arbilly, S. Goldsmith, R.L. Boxman
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Volume:
177-178
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2003.09.038
File:
PDF, 518 KB
english, 2004
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