Epitaxial Growth of High-κ Dielectrics for GaN MOSFETs

MRS Proceedings 2008 / 1 Vol. 1068

Epitaxial Growth of High-κ Dielectrics for GaN MOSFETs

Jur, Jesse S., Wheeler, Ginger D., Veety, Matthew T., Lichtenwalner, Daniel J., Barlage, Douglas W., Johnson, Mark A. L.
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Volume:
1068
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1068-C08-02
Date:
January, 2008
File:
PDF, 976 KB
english, 2008
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