Ti–Si–C sputter deposited thin film coatings

Surface and Coatings Technology 2004 Vol. 180-181; Iss. none

Ti–Si–C sputter deposited thin film coatings

Witold Gulbiński, Adam Gilewicz, Tomasz Suszko, Bogdan Warcholiński, Zbigniew Kukliński
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Volume:
180-181
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2003.10.084
File:
PDF, 483 KB
english, 2004
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