Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering
O. Zywitzki, T. Modes, H. Sahm, P. Frach, K. Goedicke, D. GlößVolume:
180-181
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2003.10.115
File:
PDF, 1.32 MB
english, 2004